About: http://webisa.webdatacommons.org/67433568

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein said low dielectric constant insulating layer is an organic material having a dielectric constant of between about 1.9 and 3.7.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com