About: http://webisa.webdatacommons.org/67457700

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, there is a problem that the conventional magnetron sputtering method has a poorer efficiency of target utilization when the target is made thinner.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com