About: http://webisa.webdatacommons.org/67515252

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The aperture is then filled with a heat sink material, such as copper or gold, and thesecond wafer is then etched away, leaving only the active layer thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com