About: http://webisa.webdatacommons.org/67582282

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, the chamber side walls must provide the RF ground or RF return and must therefore be formed of a conductive material such as aluminum, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com