About: http://webisa.webdatacommons.org/67697589

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electrode fingers are made of a conductive material, such as aluminum, which is deposited and photolithographically patterned on the substrate surface 18.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com