About: http://webisa.webdatacommons.org/67725549

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When heating in the nitrogen atmosphere, an insulating film including hydrogen is preferably used for the third insulating film or the fourth insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com