About: http://webisa.webdatacommons.org/6773113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, when a specific test section is occupied, another identical test section in an empty state can be found, and a non-processed wafer can be conveyed and supplied to the section.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com