About: http://webisa.webdatacommons.org/67773654

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Those skilled in the art will recognize that a number of materials can serve as a suitable insulating material including silicon oxynitride, or silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr