About: http://webisa.webdatacommons.org/67840131

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electronic device of claim 1, wherein the dielectric layer includes a dielectric metal oxide in which the metal is a metal other than tantalum or hafnium.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au