About: http://webisa.webdatacommons.org/67919895

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etching parameters include process variables such as reactor dimensions, a pressure, a temperature, and the like for a particular substrate and reactants.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com