| http://www.w3.org/ns/prov#value | - The process according to claim 13, wherein the metal film includes at least one material selected from the list including Al, Cu, Ag, Au, Ti, Zr, Hf, Ni, Co, Pd, Pt, V, Ta, Nb, Cr, Mo, W, Sc, Yt, La, Ce, Rh, Os, Ir, and combinations thereof.
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