PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Thus, in some embodiments, a thin adhesion layer such as Ti, TiW, or TiN (solely or in combination) may be conformally deposited on dielectric layer 504 before second metal layer 604 is deposited without departing from the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom
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