| http://www.w3.org/ns/prov#value | - The gas chemistry includes halogen species and preferably both bromine and fluorine species (e.g., HBr+SiF4 or HBr+SiF4 +NF3) for profile control as well as dopants such as helium and oxygen, also for profile control (HBr/SiF4 /NF3 /O2 /He).
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