About: http://webisa.webdatacommons.org/68151699

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These electrodes 4, 5, 6 and gates 7, 8 may be formed by conventional photo etch techniques and may be of a metal such as aluminum or polycrystalline silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com