About: http://webisa.webdatacommons.org/68789465

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other materials, including but not limited to steel and silicon, may be used to construct the micromechanical structure.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com