| http://www.w3.org/ns/prov#value | - For depositing or forming the metal trace patterns 22 u, 22 b, any metal depositing or layering techniques can be employed such as electron beam evaporation, thermal evaporation, painting, spraying, dipping, or sputtering a conductive material or metallic paint and the like or material over the selected surfaces of the piezoelectric substrate (preferably a PVDF layer as noted above).
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