PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • For example, an embodiment may vary from those described herein when the order of layers applied vary, the material types for the layers and etches vary, and/or the order of masks used vary to develop the circuit region.
http://www.w3.org/ns/prov#wasQuotedFrom
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