About: http://webisa.webdatacommons.org/69079551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Consequently, even when the insulating film is made thinner, defects such as pin holes can be avoided, and miniaturization and higher performance of a semiconductor element such as a thin film transistor can be realized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com