About: http://webisa.webdatacommons.org/69123238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, MEMS can integrate micromechanical elements and electronic elements on a common substrate material such as a silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com