About: http://webisa.webdatacommons.org/6913733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 11, insulating layer 110 is wet etched by using, for example, an etchant such as HF, and the like (e.g., an HF class of chemicals) until the surface of the etch stopper layer 108 on the gate electrode 104 is exposed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com