About: http://webisa.webdatacommons.org/69207384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, a seed layer formed of such a ruthenium layer may contain impurities, such as oxygen, and thus may show high surface resistance.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com