About: http://webisa.webdatacommons.org/69250429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	of the electron beam. [0054] Conversely, if the width of the profile becomes smaller, it can be judged that the edge is a portion existing at a reverse side (other side) to the inclination direction of the electron beam.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com