PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • A method in accordance with claim 1 , characterised in that the method is carried out such that the overall thickness of the layer sequence is in the range between approximately 0.1 ??m and approximately 20 ??m, preferably between 1 ??m and 5 ??m, and in particular between 2 and 5 ??m. 5.
http://www.w3.org/ns/prov#wasQuotedFrom
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