About: http://webisa.webdatacommons.org/6975104

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As is well known in the prior art, the barrier layer is usually chosen from the refractory metals or their alloys, such as for example, Ta, TaNX, Cr, CrNX, Ti, TiNX, W, WNX, and other alloys containing one or more of these materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr