About: http://webisa.webdatacommons.org/69855373

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a schematic cross sectional view of another example of a wafer holding body in accordance with the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr