| http://www.w3.org/ns/prov#value | - strate surface or unwanted substance on the substrate is removed. [0002]FIG. 1 shows one example of the conventional apparatus of this type, wherein a plasma generating chamber B is provided integrally and continuously with on a vacuum chamber A. A side wall around this plasma generating chamber B is composed of a material such as quartz, etc., through which electromagnetic waves are transmitted.
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