About: http://webisa.webdatacommons.org/69929159

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart for a method of making semiconductor devices in accordance with a preferred embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com