About: http://webisa.webdatacommons.org/69974084

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SiLK??? has a dielectric constant of 2.65, can be processed at temperatures up to 490??? C., and is compatible with metals such as aluminum Al, copper Cu, and the barrier materials titanium Ti, and tantalum Ta.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com