About: http://webisa.webdatacommons.org/69983952

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Field of the InventionThe present invention relates to a semiconductor memory device and in particular to a connecting structure of a deep trench capacitor in a memory device and a fabrication method thereof.2.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com