| http://www.w3.org/ns/prov#value | - itional control of the second meniscus 320 such that the viscous drag length for the second meniscus 320 is reduced and the characteristics, in particular of the plate 200, are optimized to make it energetically favorable for the second meniscus 320 to remain adhered to the plate 200 such that the scan speed of the substrate W beneath the barrier member 10 may be increased.
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