About: http://webisa.webdatacommons.org/70097255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a flow chart showing an inspection step of determining a destination of diversion of a first wafer after separation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de