About: http://webisa.webdatacommons.org/70455098

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To form the opposite electrode 21, first, by using a film forming method such as sputtering, for example, an electrode material such as indium oxide is formed on the top face of the interlayer insulating film 19.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com