About: http://webisa.webdatacommons.org/7082993

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	High YieldThe etch rate is an important parameter for the equipment, but is not the only one.
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com