About: http://webisa.webdatacommons.org/70843228

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	y any conventional method, preferably by in situ doping, though alternatively through some other method, such as ion implantation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com