About: http://webisa.webdatacommons.org/70855821

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ycled. [0099] EIW Substrate, Platform or Workpiece 14 Many aspects of the invention have been (or will be) described in the context of integrated circuit manufacturing where the substrate is a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com