About: http://webisa.webdatacommons.org/70887442

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A pressure of about 250 Pa is a suitable pressure for evaporating the ZrI4 and a pulse of about 0.5-2 seconds is sufficient to deposit a layer of about 0.5 to 5 angstroms per cycle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es