About: http://webisa.webdatacommons.org/71235037

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Denoted at 8 is another condensing optical system, and denoted at 9 is an object to be illuminated, such as a mask or reticle on which a device pattern is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com