About: http://webisa.webdatacommons.org/71554793

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 4, an electronic substrate 21 may include a semiconductor material such as silicon (Si), gallium arsenide (GaAs), silicon germanium (SiGe), and/or sapphire.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com