About: http://webisa.webdatacommons.org/71935666

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as recited in claim 1, wherein the lower electrode is selected from metal films including Pt, Au, Ag, Pd, Rh, Ru, Ir, Re or their metal alloy films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com