| http://www.w3.org/ns/prov#value | - The process of claim 1 , wherein the substrate further includes a structure selected from the group comprising an insulated silicon or gallium-arsonide substrate, a printed circuit board, a flat plate of a ceramic material such as high density alumina (Al2O3) or beryllia (BeO), or a glassy material such as fused silica. 20.
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