About: http://webisa.webdatacommons.org/7231111

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1B is a block diagram illustrating another embodiment of a system for inspecting semiconductor wafers via remote microscopy comprising two subnetworks coupled by a router;
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca