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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating and sealing layer 22 may also comprise well-known insulating materials such as silicon oxide, silicon nitride, silicon oxynitride, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com