About: http://webisa.webdatacommons.org/72470778

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The filling region is a region of a crystalline silicon film that fills an opening of a base insulating film that is formed under the crystalline silicon film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com