| http://www.w3.org/ns/prov#value | - The mobility near (e.g. within a depth less than the mean free path of the carriers) surface 153 (FIG. 1C) depends on a number of parameters affected by the process, such as surface roughness, doping and defect density (See Grove, Physics and Technology of Semiconductor Devices", page 326, incorporated by reference herein).
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