About: http://webisa.webdatacommons.org/72555741

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wafer carrier 140 may be formed from graphite or other similar material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com