About: http://webisa.webdatacommons.org/72685190

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 60 may be a semiconductor substrate or other underlying layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com