About: http://webisa.webdatacommons.org/72704372

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The preferred embodiment on the present invention is a product and a process related to MOSFETs having a refractory metal or metal silicide interconnect layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com