About: http://webisa.webdatacommons.org/7287791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a more detailed flow chart of the deposition etch phase (step 112) in this example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es