About: http://webisa.webdatacommons.org/72951421

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inhibiting step may include supplying hydrogen with or to an etchant gas, e.g. oxygen and/or it may comprise supplying nitrogen with or to the etchant gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es