About: http://webisa.webdatacommons.org/7299507

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sidewall spacers 122, 124 are an electrically insulating material, for example silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com